ELECTRONIC MATERIALS

ELECTRONIC MATERIALS

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Photo Resist Monomer

Molecular Formula or Structural Formula
Product Name
Chemical Name
CAS No.
PACS
PACS
p-Acetoxystyrene
2628-16-2
PTBS
PTBS
p-tert-Butoxystyrene
95418-58-9
PEES-2
PEES
p-(1-Ethoxyethoxy)styrene
157057-20-0

Etching Gas

Molecular Formula or Structural Formula
Product Name
Chemical Name
CAS No.
CF3I-1
FITECT™ (CF3I)
Trifluoroiodomethane
2314-97-8

MO-CVD Materials

Molecular Formula or Structural Formula
Product Name
Chemical Name
CAS No.
TMAL
EG-TMAL
Trimethylaluminum
75-24-1
TMI
EG-TMI
Trimethylindium
3385-78-2

Acid Generator

Molecular Formula or Structural Formula
Product Name
Chemical Name
CAS No.
S-PAG
S-PAG
Methyl 2,2-difluoro-
2-(fluorosulfonyl)acetate
680-15-9
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